4/27/2012	9:29:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2012	9:29:30 AM	Recipe started at 9:29 AM
4/27/2012	9:29:30 AM	Helium valve closed
4/27/2012	9:29:30 AM	H2 valve closed
4/27/2012	9:29:30 AM	BCl3 valve closed
4/27/2012	9:29:30 AM	PH3 valve closed
4/27/2012	9:29:30 AM	SiCl4 pre valve closed
4/27/2012	9:29:30 AM	SiCl4 post valve closed
4/27/2012	9:29:30 AM	Main Vac valve closed
4/27/2012	9:29:30 AM	Bypass valve closed
4/27/2012	9:29:30 AM	Bubbler valve closed
4/27/2012	9:29:30 AM	Helium MFC set to  0.000000
4/27/2012	9:29:30 AM	H2 MFC set to  0.000000
4/27/2012	9:29:30 AM	BCl3 MFC set to  0.000000
4/27/2012	9:29:30 AM	PH3 MFC set to  0.000000
4/27/2012	9:29:30 AM	SiCl4 MFC set to  0.000000
4/27/2012	9:29:30 AM	Bypass solenoid MFC set to  0.000000
4/27/2012	9:29:30 AM	Tube furnace set to 0
4/27/2012	9:29:33 AM	H2 valve closed
4/27/2012	9:29:33 AM	BCl3 valve closed
4/27/2012	9:29:33 AM	PH3 valve closed
4/27/2012	9:29:33 AM	SiCl4 pre valve closed
4/27/2012	9:29:33 AM	SiCl4 post valve closed
4/27/2012	9:29:33 AM	Main Vac valve closed
4/27/2012	9:29:33 AM	Bypass valve closed
4/27/2012	9:29:33 AM	Bubbler valve closed
4/27/2012	9:29:33 AM	Helium valve opened
4/27/2012	9:29:33 AM	Helium MFC set to  500.000000
4/27/2012	9:29:33 AM	H2 MFC set to  0.000000
4/27/2012	9:29:33 AM	BCl3 MFC set to  0.000000
4/27/2012	9:29:33 AM	PH3 MFC set to  0.000000
4/27/2012	9:29:33 AM	SiCl4 MFC set to  0.000000
4/27/2012	9:29:33 AM	Bypass solenoid MFC set to  0.000000
4/27/2012	9:29:33 AM	Tube furnace set to 0
4/27/2012	9:30:38 AM	Helium valve closed
4/27/2012	9:30:38 AM	H2 valve closed
4/27/2012	9:30:38 AM	BCl3 valve closed
4/27/2012	9:30:38 AM	PH3 valve closed
4/27/2012	9:30:38 AM	SiCl4 pre valve closed
4/27/2012	9:30:38 AM	SiCl4 post valve closed
4/27/2012	9:30:38 AM	Main Vac valve closed
4/27/2012	9:30:38 AM	Bypass valve closed
4/27/2012	9:30:38 AM	Bubbler valve closed
4/27/2012	9:30:38 AM	Helium MFC set to  0.000000
4/27/2012	9:30:38 AM	H2 MFC set to  0.000000
4/27/2012	9:30:38 AM	BCl3 MFC set to  0.000000
4/27/2012	9:30:38 AM	PH3 MFC set to  0.000000
4/27/2012	9:30:38 AM	SiCl4 MFC set to  0.000000
4/27/2012	9:30:38 AM	Bypass solenoid MFC set to  0.000000
4/27/2012	9:30:38 AM	Tube furnace set to 0
4/27/2012	9:30:39 AM	Run finished at 9:30 AM
4/27/2012	9:30:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2012	9:30:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/27/2012	9:30:50 AM	Recipe started at 9:30 AM
4/27/2012	9:30:50 AM	Helium valve closed
4/27/2012	9:30:50 AM	H2 valve closed
4/27/2012	9:30:50 AM	BCl3 valve closed
4/27/2012	9:30:50 AM	PH3 valve closed
4/27/2012	9:30:50 AM	SiCl4 pre valve closed
4/27/2012	9:30:50 AM	SiCl4 post valve closed
4/27/2012	9:30:50 AM	Main Vac valve closed
4/27/2012	9:30:50 AM	Bypass valve closed
4/27/2012	9:30:50 AM	Bubbler valve closed
4/27/2012	9:30:50 AM	Helium MFC set to  0.000000
4/27/2012	9:30:50 AM	H2 MFC set to  0.000000
4/27/2012	9:30:50 AM	BCl3 MFC set to  0.000000
4/27/2012	9:30:50 AM	PH3 MFC set to  0.000000
4/27/2012	9:30:50 AM	SiCl4 MFC set to  0.000000
4/27/2012	9:30:50 AM	Bypass solenoid MFC set to  0.000000
4/27/2012	9:30:51 AM	Tube furnace set to 0
4/27/2012	9:30:51 AM	Run finished at 9:30 AM
4/27/2012	9:30:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/27/2012	12:10:09 PM	Main Vac valve opened
4/27/2012	12:10:09 PM	Main Vac valve closed
4/27/2012	12:10:10 PM	Main Vac valve opened
4/27/2012	12:10:10 PM	Main Vac valve closed
4/27/2012	12:10:11 PM	Main Vac valve opened
4/27/2012	12:10:11 PM	Main Vac valve closed
4/27/2012	12:10:11 PM	Main Vac valve opened
4/27/2012	12:10:11 PM	Main Vac valve closed
4/27/2012	2:43:35 PM	Main Vac valve opened
4/27/2012	2:45:48 PM	Main Vac valve closed
4/27/2012	2:45:52 PM	Bypass valve opened
4/27/2012	2:45:53 PM	Bypass valve closed
4/27/2012	2:45:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2012	2:45:55 PM	Recipe started at 2:45 PM
4/27/2012	2:45:55 PM	Helium valve closed
4/27/2012	2:45:55 PM	H2 valve closed
4/27/2012	2:45:55 PM	BCl3 valve closed
4/27/2012	2:45:55 PM	PH3 valve closed
4/27/2012	2:45:55 PM	SiCl4 pre valve closed
4/27/2012	2:45:55 PM	SiCl4 post valve closed
4/27/2012	2:45:55 PM	Main Vac valve closed
4/27/2012	2:45:55 PM	Bypass valve closed
4/27/2012	2:45:55 PM	Bubbler valve closed
4/27/2012	2:45:55 PM	Helium MFC set to  0.000000
4/27/2012	2:45:55 PM	H2 MFC set to  0.000000
4/27/2012	2:45:55 PM	BCl3 MFC set to  0.000000
4/27/2012	2:45:55 PM	PH3 MFC set to  0.000000
4/27/2012	2:45:55 PM	SiCl4 MFC set to  0.000000
4/27/2012	2:45:55 PM	Bypass solenoid MFC set to  0.000000
4/27/2012	2:45:55 PM	Tube furnace set to 0
4/27/2012	2:45:58 PM	H2 valve closed
4/27/2012	2:45:58 PM	BCl3 valve closed
4/27/2012	2:45:58 PM	PH3 valve closed
4/27/2012	2:45:58 PM	SiCl4 pre valve closed
4/27/2012	2:45:58 PM	SiCl4 post valve closed
4/27/2012	2:45:58 PM	Main Vac valve closed
4/27/2012	2:45:58 PM	Bypass valve closed
4/27/2012	2:45:58 PM	Bubbler valve closed
4/27/2012	2:45:58 PM	Helium valve opened
4/27/2012	2:45:58 PM	Helium MFC set to  500.000000
4/27/2012	2:45:58 PM	H2 MFC set to  0.000000
4/27/2012	2:45:58 PM	BCl3 MFC set to  0.000000
4/27/2012	2:45:58 PM	PH3 MFC set to  0.000000
4/27/2012	2:45:58 PM	SiCl4 MFC set to  0.000000
4/27/2012	2:45:58 PM	Bypass solenoid MFC set to  0.000000
4/27/2012	2:45:58 PM	Tube furnace set to 0
4/27/2012	2:46:16 PM	Run aborted at 2:46 PM
4/27/2012	2:46:16 PM	Helium valve closed
4/27/2012	2:46:16 PM	H2 valve closed
4/27/2012	2:46:16 PM	BCl3 valve closed
4/27/2012	2:46:17 PM	PH3 valve closed
4/27/2012	2:46:17 PM	SiCl4 pre valve closed
4/27/2012	2:46:17 PM	SiCl4 post valve closed
4/27/2012	2:46:17 PM	Bypass valve closed
4/27/2012	2:46:17 PM	Main Vac valve closed
4/27/2012	2:46:17 PM	Bubbler valve closed
4/27/2012	2:46:17 PM	Helium MFC set to  0.000000
4/27/2012	2:46:17 PM	H2 MFC set to  0.000000
4/27/2012	2:46:17 PM	BCl3 MFC set to  0.000000
4/27/2012	2:46:17 PM	PH3 MFC set to  0.000000
4/27/2012	2:46:17 PM	SiCl4 MFC set to  0.000000
4/27/2012	2:46:17 PM	Tube furnace set to 0
4/27/2012	2:46:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2012	2:46:20 PM	Bypass valve opened
4/27/2012	2:46:57 PM	Bypass valve closed
4/27/2012	3:04:06 PM	Helium MFC set to  10.000000
4/27/2012	3:04:34 PM	Helium valve opened
4/27/2012	3:04:37 PM	Helium valve closed
4/27/2012	3:04:43 PM	Helium MFC set to  100.000000
4/27/2012	3:04:44 PM	Helium valve opened
4/27/2012	3:04:51 PM	Helium valve closed
4/27/2012	3:04:57 PM	Helium MFC set to  500.000000
4/27/2012	3:05:01 PM	Helium valve opened
4/27/2012	3:05:22 PM	Helium valve closed
4/27/2012	3:06:10 PM	Bypass valve opened
4/27/2012	3:07:59 PM	Bypass valve closed
4/27/2012	3:14:02 PM	Bypass valve opened
4/27/2012	3:18:24 PM	Bypass valve closed
4/27/2012	3:20:37 PM	Main Vac valve opened
4/27/2012	3:21:24 PM	Main Vac valve closed
4/27/2012	3:21:28 PM	Helium MFC set to  100.000000
4/27/2012	3:21:30 PM	Helium valve opened
4/27/2012	3:21:31 PM	Helium valve closed
4/27/2012	3:30:32 PM	Main Vac valve opened
4/27/2012	3:31:15 PM	Helium MFC set to  10.000000
4/27/2012	3:31:17 PM	Main Vac valve closed
4/27/2012	3:31:18 PM	Helium valve opened
4/27/2012	3:31:40 PM	Helium valve closed
4/27/2012	3:31:41 PM	Bypass valve opened
4/27/2012	3:31:49 PM	Bypass valve closed
4/27/2012	3:31:49 PM	Main Vac valve opened
4/27/2012	3:37:02 PM	Main Vac valve closed
4/27/2012	3:37:10 PM	Main Vac valve opened
4/27/2012	4:13:36 PM	Main Vac valve closed
4/27/2012	4:13:49 PM	Main Vac valve opened
